ʻOʻoleʻa Graphite Felt

Hoʻolālā ʻia ka Semixlab Rigid Graphite Felt (RGF) ma ke ʻano he insulation kiʻekiʻe kiʻekiʻe a me ka mea hoʻokele wela no ka ulu ʻana o Physical Vapor Transport (PVT) o nā kristal hoʻokahi SiC. Hoʻolālā ʻia no ka hoʻohana ʻana i ka hana wafer 4H- a me 6H-SiC wafer, ua hui pū kēia manaʻo paʻa i ka conductivity thermal ultra-haʻahaʻa, kūpaʻa kiʻekiʻe kiʻekiʻe, a me ka maʻemaʻe kemika ʻokoʻa, e lilo ia i mea pōhaku kihi i nā kapuahi sublimation SiC kiʻekiʻe. ʻO kāna noi e hōʻoia i ka mana pololei o nā gradients thermal, nā kūlana ulu paʻa, a me ka maikaʻi o ka kristal i hoʻonui ʻia i nā pōʻai hana lōʻihi.

Ma ke kaʻina hana ʻo SiC PVT, ʻo ka mālama ʻana i kahi māla wela like ʻole ka mea nui i ka loaʻa ʻana o nā kristal hoʻokahi kīnā ʻole. Hana ʻia ka Graphite Rigid Felt ma ke ʻano he insulation umu ahi mua, e hoʻopuni ana i ka sublimation crucible a me nā hale wela. ʻO ka haʻahaʻa haʻahaʻa haʻahaʻa haʻahaʻa e hōʻemi ana i ka nalo wela i makemake ʻole ʻia, e mālama ana i ka gradient wela i koho ʻia ma waena o ke kumu SiC a me ke aniani hua. Ma ka hoʻomalu ʻana i nā profiles radial a me ka axial wela, hoʻemi ka RGF i ka hoʻokumu ʻana o nā dislocations basal plane, nā hewa hoʻopaʻa ʻana, a me nā micropipes, e hoʻopilikia pololei ana i ka hoʻonohonoho pono a me ka hana uila o nā wafers SiC hopena.

Ma waho aʻe o kona hiki ke insulation thermal, ʻo ke ʻano paʻa o ka graphite o Semixlab i manaʻo e hāʻawi i ka paʻa mechanical i nā wahi wela kiʻekiʻe ma mua o 2000°C. ʻAʻole e like me nā mea ʻoluʻolu a palupalu paha, mālama ʻo RGF i kona ʻano ma lalo o ke kaʻa kaʻa wela lōʻihi, e pale ana i ka hāʻule ʻana a i ʻole ka deformation e hiki ke hoʻopilikia i ke kahua wela a i ʻole e hoʻololi i ke ola o ka umu. ʻO kona ʻano kemika e hōʻoia i ka liʻiliʻi o ka hoʻokuʻu ʻana i nā ʻāpana a pale aku i ka haumia o ka boule SiC, he mea koʻikoʻi ia no ka hana ʻana i nā substrates resistivity kiʻekiʻe no ka uila uila a me nā noi mea hana ākea-bandgap.

Hana ʻia me ka hoʻohana ʻana i ka carbon graphitic maʻemaʻe kiʻekiʻe a me nā ʻenehana densification kiʻekiʻe, hōʻike ʻo Semixlab Graphite Rigid Felt i ka paʻa like ʻole, ke kūpaʻa maikaʻi loa, a me ka lōʻihi lōʻihi. ʻO kāna hui pū ʻana o ka hana wela a me ka rigidity mechanical e hiki ai i nā semiconductor fabs ke hoʻokō i ka nui o ka ulu ʻana, nā kiʻi wela reproducible, a me ka hoʻohaʻahaʻa ʻana i nā ʻōnaehana PVT. Ma ka hoʻonui ʻana i ka pono wela o ka umu, hāʻawi pū ʻo RGF i ka mālama ʻana i ka ikehu me ka hoʻonui ʻana i ka like ʻana o ka wafer a me ka hua.

Hāʻawi ʻo Semixlab's Rigid Graphite Felt i ka hana, ka maʻemaʻe, a me ka paʻa o ke kūkulu ʻana i koi ʻia e kākoʻo i ka ulu ʻana o ka kristal hoʻokahi SiC kiʻekiʻe, e hāʻawi ana i nā mea hana i kahi hopena waiwai paʻa no ka hana wafer o nā hanauna e hiki mai ana, hoʻolōʻihi ʻia ke ola umu, a me ka hoʻokele wela maikaʻi i nā kaiapuni wela kiʻekiʻe.