SiC Keramika

Hoʻohana nui ʻia nā keramika SiC i nā lako semiconductor, ʻoiai no ka mea ʻoi aku ka maikaʻi o ko lākou kūpaʻa ʻana i nā kūlana paʻakikī. Ke piʻi ka mahana a i ʻole ke kaʻina hana e ʻoi aku ka ikaika, hiki i nā mea e like me ka quartz a i ʻole silicon ke hoʻomaka e hōʻike i nā palena, a ʻo ia ka mea maʻamau kahi e komo ai ʻo SiC. I nā kaʻina hana umu e like me ka oxidation a i ʻole ka diffusion, ʻo nā ʻāpana e like me nā waʻa wafer a i ʻole nā ​​hoe i hana ʻia mai SiC e lōʻihi ka lōʻihi. Mālama lākou i ko lākou ʻano a ʻaʻole lawe mai i ka nui o ka haumia, ʻoiai ma hope o ka holo lōʻihi. Hoʻololi pinepine ka poʻe mai ka quartz no kēia kumu, ʻoiai ke lilo ka mālama pinepine ʻana.

No ke kālai ʻana, koho pinepine ʻia ʻo SiC no ka mea e ola lōʻihi ia i ka plasma. ʻIke ʻia ka ʻokoʻa o ke ola i hoʻohālikelike ʻia me nā ʻāpana silicon i nā hoʻonohonoho he nui, ʻoiai ke hilinaʻi nei ia i ke kaʻina hana pololei. Kōkua iki nō hoʻi ia me ka kaohi ʻana i nā ʻāpana, kahi e lilo ai i mea ʻike nui i ka wā e emi ai nā node. E ʻike pū ʻoe iā SiC i hoʻohana ʻia ma ke ʻano he susceptors ma MOCVD a i ʻole CVD. I kēlā mau hihia, ʻaʻole ia e pili ana i ka "ikaika" a ʻoi aku ka nui o ka mālama ʻana i ke ʻano o ka mahana. Ma waho aʻe o kēlā, ʻike ʻia ia ma nā ʻāpana keʻena e like me nā liners a i ʻole nā ​​​​poʻo ʻauʻau, a i kekahi manawa i ka lawelawe ʻana i nā ʻāpana pū kekahi.