Pale Hea Quartz

ʻO ka Quartz Heat Shield, i hana ʻia me ka quartz keʻokeʻo keʻokeʻo, he ʻāpana hoʻokele wela kiʻekiʻe i hana ʻia no ka hoʻohana ʻana i nā ʻōnaehana epitaxy SiC kiʻekiʻe. Hoʻohālikelike ʻia me ka quartz transparent, hāʻawi kēia mea i ka insulation ʻoi aku ka maikaʻi, hoʻomaikaʻi i ka paʻa o ke kaʻina hana, a ʻoi aku ka maikaʻi o ke kumu kūʻai - e lilo ia i mea kūpono no ka pale wela ma MOCVD a me nā keʻena pane CVD.

Ⅰ. Hoʻohui Mea a me nā ʻano kino kino

● Mea: Milky white quartz (synthetic fused silica with dispersed microbubbles and grain boundaries)

● Ke kala a me ka helehelena: Translucent keʻokeʻo

● Hoʻoheheʻe Thermal: ʻOi aku ka haʻahaʻa ma mua o ka quartz alohilohi ma muli o ke ʻano o ka ʻōpū o loko

● Ka Mahana Hana: Paʻa a hiki i 1700°C

● Koefficient Hoonui wela: ~0.55 × 10⁻⁶ /K (like me ka quartz alohilohi)

● Kiekie Thermal Shock Resistance

● Maʻemaʻe Kemika maikaʻi loa: E mālama i nā mea haumia (e laʻa, Al, Na) ma lalo o 1 ppm

Ⅱ. Nā Hana Koʻikoʻi ma nā polokalamu SiC Epitaxy

Ua koho pono ʻia ka quartz keʻokeʻo Milky no nā reactors epitaxial SiC ma muli o kēia mau pono koʻikoʻi:

(1) Hoʻonui i ka hana ʻana o ka hoʻoheheʻe wela

ʻO ka hoʻopuehu ʻana i ka hoʻoheheʻe ʻana i ka infrared: Hoʻopuehu nā ʻōpū o loko a me nā palena o ka palaoa i nā manawa he nui. Hāʻawi ʻo 30-50% ʻoi aku ka maikaʻi ma mua o ka quartz transparent ma lalo o nā kūlana 1500-1700 ° C.

Haʻahaʻa Thermal Conductivity: Hoʻemi ka microbubble puʻupuʻu i ka nalo wela conductive, e hoʻonui ana i ka pono wela.

(2) Paʻa a me ke kūpaʻa kiʻekiʻe

ʻO ke kū ʻana o ka puʻu wela: ʻOiai e kaʻana like ana i ka helu hoʻonui like me ka quartz maʻemaʻe, kōkua kāna microstructure e hoʻomoʻa i ke koʻikoʻi wela kūloko - kūpono no nā kaʻina hana wikiwiki.

Kū'ē Crystallization: Ma nā ea hoʻohaʻahaʻa kiʻekiʻe (e laʻa, H₂), ʻoi aku ka paʻa o ka quartz milky i ka devitrification i loko o ka α-cristobalite, e hōʻemi ana i ka pōʻino o ka haki.

(3) Hoʻohālikelike kaʻina hana a me ka Mana Deposition

Hoʻemi ʻia ʻo Parasitic Deposition: ʻO kona opacity e hoʻemi i ka wela nui kūloko, kahi e pale ai i ka decomposition mua o nā precursors (e laʻa, SiH₄, C₃H₈) ma luna o ka pale.

Kūlana Kūlana Kūlike: Hoʻolaha ka hoʻopuehu ʻana i ka hāʻawi ʻana i ka mahana ma waena o ka wahi pane, koʻikoʻi no ka hoʻokō ʻana i ka like ʻana o ka papa epitaxial i nā mea mana SiC.

(4) Kūʻai-Elele

Kumukūʻai haʻahaʻa haʻahaʻa: ʻoi aku ka maʻalahi o ka quartz keʻokeʻo Milky ma mua o ka quartz transparent ultra-high-purity, e kūpono ana ia ma ke ʻano he mea hoʻohana ʻia i ka mea pale wela.

(5) Maintenance & Noonoo

Hoʻomaʻemaʻe Maʻemaʻe: E hōʻoia i nā pae haumia haʻahaʻa loa (Al, Na <1 ppm) e pale i ka hoʻohaumia ʻana o ka ʻili epitaxial SiC.

Hoʻokele Ola: Ma hope o ka hoʻohana lōʻihi ʻana (maʻamau ma mua o 1000 mau hola), hiki ke hoʻohaʻahaʻa ka microbubble coalescence i ka hana wela—pono ke hoʻololi maʻamau.

Nā Typical Applications

✔SiC MOCVD a me CVD reactors

✔Epitaxial ulu o SiC mana semiconductors

✔ ʻO ka diffusion kiʻekiʻe-mehana a me nā keʻena deposition

✔Ka pale wela wela i loko o nā wahi ʻea kinoea