ʻO ka pahu hoʻoheheʻe Quartz

ʻO Semixlab's Quartz Diffusion Tubes he mea hoʻomaʻemaʻe kiʻekiʻe, thermally stable quartz i hoʻolālā ʻia no ka diffusion, oxidation, a me nā hana annealing i ka hana semiconductor. Hoʻolālā ʻia e hana ma lalo o nā kūlana wela loa, ʻo kēia mau paipu nā mea pono i loko o nā ʻōnaehana kapuaʻi ākea a me ke kūpaʻa i hoʻohana ʻia i nā cell solar.

Ⅰ.Ka Hui Mea

Hana ʻia kā mākou mau paipu diffusion mai 99.995% pure fused silica (SiO₂), i hoʻokumu ʻia mai nā mea hoʻolako waiwai maka kiʻekiʻe a hoʻohana ʻia me ka hoʻohana ʻana i nā ʻano hana wela a me nā hana annealing. Mālama kēia i ke kū'ē kūʻokoʻa i ka haʻalulu wela, ke kūpaʻa kemika, a me ka liʻiliʻi ionic contamination - nā mea koʻikoʻi no ka mālama ʻana i ka hua wafer a me ka pono o nā mea hana.

● Mea: High-Purity Synthetic Fused Silica

● Papa haumia: ≤10 ppm (Metallic impurities)

● Hoʻokumu Crystal: Amorphous

Ⅱ. Nā noi koʻikoʻi ma ka hana semiconductor

He mea nui ka Semixlab's Quartz Diffusion Tubes i nā ʻano hana hana semiconductor koʻikoʻi, e pāʻani ana i kahi hana koʻikoʻi i ka hoʻokō ʻana i nā waiwai waiwai a me ka hana ʻana o nā mea hana.

Nā Kaʻina Hoʻolaha

I loko o nā umu diffusion, ʻo kā mākou mau paipu ke keʻena pane kahi e hoʻokomo ʻia ai nā haumia dopant (e laʻa, boron, phosphorus, arsenic) i loko o nā wafers semiconductor i nā wela kiʻekiʻe. Hāʻawi nā paipu i kahi kaiapuni hermetically i hoʻopaʻa ʻia, ʻaʻohe contamination no ka mana pololei ma luna o nā profile doping. ʻO kā lākou kūpaʻa wela e hōʻoia i ka hāʻawi like ʻana o ka mahana, e alakaʻi ana i ke komo ʻana o ka dopant a me ka hoʻāla ʻana, he mea koʻikoʻi ia no ka wehewehe ʻana i nā hiʻohiʻona uila.

Nā Kaʻina Oxidation

I ka wā o ka hoʻoheheʻe ʻana i ka wela, ʻike ʻia nā wafers silika i ka oxygen a i ʻole ka mahu wai ma nā wela kiʻekiʻe i loko o ka paipu quartz e ulu i kahi ʻāpana lahilahi, insulating o ka silicon dioxide (SiO₂). Ke hana nei kēia ʻāpana SiO₂ ma ke ʻano he dielectric puka, papa hoʻokaʻawale, a i ʻole ka papa passivation. ʻO ka maʻemaʻe kiʻekiʻe a me ka nui o ka paʻa o kā mākou mau paipu ka mea nui ma ʻaneʻi, no ka mea, pili pono lākou i ka like ʻole, ka mānoanoa, a me ka maikaʻi o ka uila o ka papa oxide, he mea nui ia i ka hana a me ka hilinaʻi.

Nā Kaʻina Hana Hana

Hoʻohana ʻia ka Annealing no ka hoʻoponopono ʻana i ka pōʻino o ka lattice crystal i hoʻokumu ʻia e ka implantation ion a e hoʻāla i nā dopants implanted. Hāʻawi kā mākou mau paipu quartz i ka maʻemaʻe a me ka hoʻomalu ʻia ʻana o ke kaiapuni kiʻekiʻe e pono ai no kēia mau ʻanuʻu annealing. ʻO nā waiwai wela maikaʻi o ka quartz e hōʻoia i ka mālama ʻana i ka wela ma waena o ka wafer, e alakaʻi ana i ka hōʻemi maikaʻi ʻana a me ka hoʻoulu ʻana o ka dopant maikaʻi loa, e hoʻomaikaʻi nui i nā ʻano uila a me ka paʻa lōʻihi.