No ke aha he mea koʻikoʻi ka Graphite Maʻemaʻe Kiʻekiʻe no ka Manaʻo ʻana i nā hemahema SiC Epitaxy

Hoʻopilikia ʻia ke ʻano o ka wafer silicon carbide (SiC) i hana ʻia e nā loli liʻiliʻi i ke kaiapuni ulu. ʻO kahi wahi i noʻonoʻo ʻole ʻia e ka poʻe he nui ʻo ia ka graphite e uhi ana i ka reactor. Kū ia i ka hoʻāʻo o ka wela nui i loaʻa i loko o ka reactor ʻoiai e kākoʻo ana a hoʻonoho i ka wafer i ka wā epitaxy. Inā haumia a hoʻonohonoho ʻole ʻia paha ka graphite, hiki ke waiho ʻia nā ʻāpana liʻiliʻi o ka mea a i ʻole kahi hopena makemake ʻole ʻia ma ke kaʻina hana ulu. Hiki i nā pilikia liʻiliʻi ma ka ʻili o nā graphite ke ulu i nā hemahema wafer nui, e hopena ana i ka hana hou aʻe a me nā hua haʻahaʻa no nā mea hana chip. No laila ke kūlana a me ka maʻemaʻe o ka Kāpena graphite he mea nui aʻe ma mua o ka manaʻo o ka hapa nui.

Pehea e hoʻohuli ai ka maʻemaʻe o ke Graphite i nā pilikia o nā ʻāpana i loko o nā keʻena epitaxy?

He kīnā wafer ākea nā ʻāpana i loko o nā keʻena epitaxy SiC, a hoʻokomo pinepine i ka graphite i ke kaʻina hana. Noho nā ʻāpana graphite ma ka ʻāpana wela o ka reactor SiC, e lawe ana i ka wafer a hoʻohuli i nā contours thermal. Me ka hoʻohana ʻana i ka graphite maʻemaʻe ʻole, hiki i nā haumia trace, e like me nā mea haumia metala, ka lehu, a i ʻole nā ​​​​koena koena o ke kaʻina hana, ke puka mālie mai ka graphite i ka wā o ka ulu ʻana o ka mahana kiʻekiʻe. ʻAʻole ʻike pinepine ʻia nā haumia i hoʻokuʻu ʻia i loko o ke keʻena, akā pae hope lākou ma luna o ka wafer, a lilo paha i ʻāpana o ka pae kinoea. No ka laʻana, ma kekahi noi ua koho kahi fab no kahi graphite haʻahaʻa no ka mālama kālā. ʻOiai ʻaʻohe pilikia i ʻike ʻia i ka wā o nā holo pōkole i ka wā mua, ma hope o kekahi mau pōʻaiapuni o ʻO kahi epitaxy , ua ʻike ʻia nā lua pin a me nā kiko ʻino ma ka ʻili wafer. Ua huli ʻia ke kumu o ia mau hemahema i nā ʻāpana liʻiliʻi i hoʻokuʻu ʻia mai ka mea paʻa graphite a i ʻole ka susceptor. E komo nā ʻāpana i loko o ke keʻena ulu a hana e like me nā hua ma ke ʻano makemake ʻole ʻia. ʻO ka nui like ʻole o ka ʻāpana graphite e kōkua pū i ka micro-cracking ma ka ʻili o ka ʻāpana i ka wā e hoʻomehana ai, e alakaʻi ana i ka hoʻokahe ʻana o nā ʻāpana maikaʻi i loko o ke keʻena i ka hala ʻana o ka manawa, ʻoiai ke ʻano maʻemaʻe paha ka ʻāpana. No laila, ʻo ka nānā ʻana i ke kumu o ka graphite a me kona mōʻaukala he hana maʻamau ia i nā fabs e pale aku i nā hemahema e pili ana i nā ʻāpana. ʻO ka graphite maʻemaʻe kiʻekiʻe me ka nui o ka lehu i kāohi ʻia he mea makemake nui ʻia, ʻoi aku hoʻi no nā hana lōʻihi. Nānā ʻia hoʻi ka helu ʻana o nā pōʻaiapuni thermal o nā ʻāpana no ka mea e hoʻokahe nā mea i nā ʻāpana ʻoiai ma hope o nā hana mua maikaʻi. Eia kekahi, ʻo ke ʻano mālama no nā ʻāpana graphite e hoʻopilikia i nā hemahema. No ka laʻana, ʻo nā kaʻina hana hoʻomaʻemaʻe ikaika e hōʻino i ka ʻili graphite a hopena i nā micro-cracks. ʻO ke ʻano makemake ʻia he hana hoʻomaʻemaʻe mālie, i kāohi ʻia me ka liʻiliʻi o ka launa kino me nā ʻāpana graphite. No nā kumu hoʻokele waiwai, ʻoi aku ka maikaʻi o ka hoʻololi ʻana i nā ʻāpana ma mua o ka mea i manaʻo ʻia ma mua o ka hoʻoponopono ʻana i ka nalowale o ka hua ma nā pae ma hope. I ka pōkole, ʻo ka kaohi ʻana o ka hanauna ʻāpana i loko o kahi kaʻina hana epitaxy SiC maʻamau e pili ana i nā kikoʻī liʻiliʻi e pili ana i ka maikaʻi o nā mea a me nā hana lawelawe. ʻO ke kumu o ka maikaʻi o ka graphite ke kumu o ka mea.

Nā Pono Mea no nā ʻĀpana Epitaxial SiC Kiʻekiʻe a me nā Susceptors

No ka epitaxy SiC, ʻoi aku nā ʻāpana i loko o ka reactor ma mua o ka 'paʻa' ʻana i ka wafer. Hoʻopili pololei nā Susceptors, nā mea lawe graphite a me nā ʻāpana hotzone i loko o ka reactor i ka ulu ʻana o ka kristal. ʻO ia ke kumu e koi nui ai nā mea a e hōʻike hope ʻia kahi kīnā liʻiliʻi ma ke ʻano he kīnā ma ka wafer. ʻO ke kūpaʻa wela kiʻekiʻe kahi koi nui. Hoʻomehana ʻia nā ʻāpana i nā mahana kiʻekiʻe loa no ka manawa lōʻihi (i kekahi manawa nā pōʻaiapuni hoʻomehana/hoʻoluʻu hou). ʻO kahi mea hiki ʻole ke mālama i ke kūpaʻa ma kēia mau mahana e hoʻopilikia a hiki ke haki hope. Hiki i nā loli liʻiliʻi i ke geometry ke hoʻololi nui i ke kahe kinoea a me ka hoʻolaha wela e hopena ai i ka ulu ʻana o ka kristal ʻaʻole like ma ka ʻili wafer. ʻO ka maʻemaʻe kekahi mea koʻikoʻi. Pono nā kaʻina hana SiC kiʻekiʻe i ka ʻike metala haʻahaʻa loa a me ka pae lehu haʻahaʻa loa i nā ʻāpana graphite. I ka wā o ka hana, e lele mālie nā metala trace mai nā ʻāpana, hiki i nā mea haumia ke hoʻolaha i loko o ke keʻena a hopena i ka haumia ʻāpana a i ʻole nā ​​​​hemahema kristal kūloko. I kekahi mau fabs, ua huli ʻia ka hewa stacking random i hoʻokahi pūʻulu o ka susceptor haumia. He koi koʻikoʻi ke ʻano o ka ʻili. ʻO kahi ʻili laumania a kaulike e kōkua i ka hōʻemi ʻana i ka hoʻokahe ʻana o nā ʻāpana i ka wā o ke kaʻina hoʻomehana/hoʻoluʻu. ʻO kahi ʻili like ʻole, a i ʻole nā ​​​​pores i loko o ka ʻili, e wāwahi mau i ka wā o ka hana a pēlā e hoʻopuka ai i kahi kumu paʻa o nā ʻāpana i loko o ke keʻena. ʻO ke ʻano o ka uhi ʻana kekahi mea pono nui. Hoʻohana ka nui o nā susceptors kiʻekiʻe i ka uhi SiC ma ke ʻano he papa pale. Pono ka uhi e pili pono i ka mea kumu a pono e kū i ka hana lōʻihi. ʻO ka hoʻopaʻa maikaʻi ʻole a me ka de-lamination e hōʻike pololei i ka graphite kumu i ke kaiapuni hopena ʻino. ʻIke pinepine mākou i kēia ma nā noi maoli: no ka laʻana, ʻo kahi wafer fab e holo ana no ka pūʻulu hana lōʻihi e ʻike i ka piʻi ʻana o ka helu hemahema ma hope o nā haneli mau pōʻaiapuni. ʻO ka nānā ʻana i ka susceptor e hōʻike i kahi ʻaʻahu iki o ka uhi a me ka ʻino o ka lihi. ʻO ka hoʻololi a i ʻole ka hoʻololi ʻana i ka ʻāpana e hoʻihoʻi i ka helu hemahema i kahi pae i ʻae ʻia. ʻO ke koho ʻana i nā mea kūpono ʻaʻole wale e pili ana i ka hana mua o nā ʻāpana, akā ʻo ke kūpaʻa o ka mea i nā pōʻaiapuni hou.

Nā hopena o ke ʻano o ka palaoa ma ke kūpaʻa wela ma nā ʻōnaehana AIXTRON G10

ʻO ke ʻano o ka palaoa o nā ʻāpana graphite i loko o kahi SiC wela kiʻekiʻe Epitaxy ulu ʻōnaehana, e like me ka AIXTRON G10, hoʻopilikia nui i ke kūpaʻa wela. Pili kēia i nā loli dimensional, ka paʻa ʻana o ke ʻano, a me ka pane ʻana i ka paipa wela. ʻAʻole he paʻa monolithic ka Graphite. Loaʻa iā ia nā crystallites a i ʻole nā ​​​​hua he nui. Hiki i nā crystallites pākahi ke loaʻa nā kuhikuhi like ʻole. Ke loaʻa ka mana maikaʻi ʻole o ka nui o ka hua i loko o ka ʻāpana graphite, kū mai ka hoʻolaha wela like ʻole. Hoʻomehana a hoʻomaʻalili nā wahi o ka ʻāpana i nā helu like ʻole. Hoʻokumu kēia i ke kaumaha kūloko ma kahi pae micro. Mālie i ka hala ʻana o ka manawa, hoʻoulu kēia kaumaha kūloko i ka warp a i ʻole ka distortion i nā ʻāpana e like me ka susceptor a i ʻole ka mea lawe wafer. Hiki ke ʻike maʻalahi i kēia kaʻina hana i ka wā o ka hana ʻana. ʻIke pinepine ʻia ia i ka wā e hana ana ka laina wafer i nā mahana kiʻekiʻe. Hoʻomaka ka maikaʻi o ka wafer e neʻe ma hope o nā haneli o nā pōʻaiapuni wela. Hoʻonui nā ʻano like ʻole o ka mānoanoa, a hoʻomaka nā hemahema lihi e puka pinepine. Ke nānā ʻia kēia mau ʻāpana, loaʻa iā lākou nā hōʻailona o ka warping a i ʻole ka luhi o ka mea. ʻO nā ʻano palaoa maikaʻi me ka hoʻolaha crystallite i kāohi ʻia e loaʻa ka paʻa wela maikaʻi loa ma mua o nā palaoa coarse a i ʻole nā ​​​​​​hale random. E hopena kēia i ka hoʻoili wela like a me ka hoʻemi ʻana i nā kiko stress localized. Me kahi ʻano palaoa kūpono, e kūʻē nā ʻāpana i ka warp ma luna o nā haneli o nā pōʻaiapuni thermal. ʻO nā ʻano coarse a i ʻole nā ​​​​​​ʻano palaoa i hoʻolaha maikaʻi ʻole ʻia e hopena i nā wahi nāwaliwali i loko o ka ʻāpana, e ʻae ana i ka microcracking a me ka hoʻokuʻu ʻana o nā ʻāpana i loko o ke keʻena. ʻO kekahi pilikia koʻikoʻi e noʻonoʻo ai, ʻo ia ke kūʻē ʻana i ka haʻalulu thermal. Aia nā wahi kahi e loli ai ka mahana o ka ʻāpana e like me ka hoʻouka ʻana i loko o ka reactor a i ʻole ma ka wehe ʻana. Inā he mau palena nāwaliwali ma waena o nā palaoa a laila hiki ke hana ʻia nā micro-cracks ma nā laina palaoa. ʻOiai ʻaʻole kēia e hopena pinepine i ka hāʻule ʻana o ka ʻāpana, ʻae ia i kēia mau nāwaliwali e hana i loko o ka mea, e alakaʻi ana i nā pilikia hilinaʻi i ka wā e hiki mai ana. Hoʻopaʻa ka hapa nui o nā fabs i ke ola o ka ʻāpana ma o nā hola i hoʻohana ʻia, a me ka helu o nā pōʻaiapuni thermal a me ka mālama wela holoʻokoʻa. ʻO nā ʻāpana me ke ʻano palaoa i hana maikaʻi ʻia he ola lōʻihi, nā hopena kūlike i ka hala ʻana o ka manawa.

Hoʻemi i ka haumia metala i nā ʻāpana Graphite maʻemaʻe kiʻekiʻe

ʻO kekahi o nā pilikia "ʻike ʻole ʻia" akā koʻikoʻi i kekahi ʻāpana graphite, me ke kaʻina hana epitaxy SiC, ʻo ia ka haumia metala. ʻOiai nā kaha liʻiliʻi o nā metala i loko o kahi ʻāpana graphite hiki ke komo i loko o ke kaʻina hana a lilo i kumu o nā hemahema paʻakikī ke ʻimi i loko o kahi reactor epitaxy SiC e like me ka AIXTRON G10. ʻO kēlā mau metala e puka pinepine mai ana mai nā mea maka a i ʻole nā ​​​​ʻanuʻu hana like ʻole i komo i ka hana ʻana o ka ʻāpana graphite. ʻO nā mea e like me ka Iron, Nickel, Calcium a me Sodium he mea maʻamau a noho paʻa i loko o ka nui o ka graphite ma ka mahana o ka lumi, akā naʻe, ma ka mahana hana kiʻekiʻe i hoʻohana ʻia ma SiC epitaxy, hiki i kēia mau mea ke lilo i mobile. Hiki ke hoʻopau ʻia kēia mau metala trace a neʻe paha ma luna o ka ʻili i ka wā o nā pōʻaiapuni hoʻomehana/hoʻoluʻu hou ʻana i ka ʻāpana wela, ʻo ia hoʻi ka susceptor a i ʻole ka mea lawe wafer ponoʻī. ʻO kahi hihia maʻamau e like me kēia: hoʻomaka kahi fab i kahi pūʻulu hana me ka hoʻohana ʻana i nā ʻāpana graphite hou. Maikaʻi nā wafers mua a ʻaʻohe hemahema, akā ma hope o kekahi manawa, hoʻomaka nā hemahema liʻiliʻi e ʻike ʻia. ʻO ka maʻamau he mau lua liʻiliʻi, nā hewa stack random, a i ʻole nā ​​​​hanana ʻāpana hiki ʻole ke wehewehe ʻia. He mea maʻalahi ke kānalua hewa i kahi kahe kinoea hewa a i ʻole kahi hanana haumia i ka wā o ka hoʻomaʻemaʻe ʻana o ke keʻena. Akā ʻo ka loiloi kikoʻī pinepine e alakaʻi i ka hoʻokuʻu lohi ʻana o nā metala trace mai nā ʻāpana graphite. ʻO ka kaohi ʻana i ka maʻemaʻe o ka graphite kekahi o nā kī. No nā ʻāpana koʻikoʻi, makemake mau ʻia ka graphite i hoʻomaʻemaʻe ʻia i ka mahana kiʻekiʻe me ka lehu haʻahaʻa. Hoʻopau kēia hana hoʻomaʻemaʻe i ka hapa nui o nā koena metala. Hiki i kēlā graphite ke hoʻopaʻa i nā mea i hoʻopaʻa ʻia no ka manawa lōʻihi ʻoiai ma lalo o nā pōʻaiapuni hoʻomehana/hoʻoluʻu pinepine. He mea nui loa ka nānā ʻana i nā ʻāpana graphite i kekahi mau fabs. ʻO ka hoʻāʻo ʻana i nā pūʻulu graphite me nā ʻano hana e like me ICP-OES a i ʻole XRF hiki ke pale i ka hoʻohana ʻana i nā ʻāpana haumia. Hiki paha iā ia ke pale i ka hoʻohuihui ʻana i nā ʻāpana mai nā kumu like ʻole i loko o ke kahe hana like. Kōkua pū nā uhi e like me SiC a i ʻole TaC i ka hoʻoponopono ʻana i ka pilikia ma ka hana ʻana ma ke ʻano he pale ma waena o ka ʻāpana graphite a me ke kaiapuni hana. Inā waiho maikaʻi ʻia ka uhi a hoʻopaʻa ʻia i ka substrate graphite ma lalo, e hōʻemi ia i ka pilina ʻāpana graphite me ke kaiapuni hana. ʻO ka mea hope akā ʻaʻole ka mea liʻiliʻi loa ka lawelawe ʻana a me ka mālama ʻana i nā ʻāpana graphite. Hiki ke haumia nā ʻāpana graphite i ka wā e lawelawe ai me nā mīkina lima lepo, nā mea hana a i ʻole ma ka mālama ʻia ʻana ma kahi papa haumia. Hiki i kēia haumia ʻili ke komo i loko o ka umu i ka wā o ke kaʻina hana hoʻomehana. No ka hōʻemi ʻana i ka haumia metala o nā ʻāpana graphite, he huina ia o nā hana liʻiliʻi he nui. Pono kahi mea maʻemaʻe kiʻekiʻe i hui pū ʻia me ka hoʻomaʻamaʻa lawelawe maikaʻi a me ka kaohi kaʻina hana paʻa.

No ke aha e koi ai ʻo Veeco EPIK Systems i nā mea Graphite Ultra-Low Porosity?

ʻO nā ʻāpana graphite i loko o ka paepae Veeco EPIK Systems e hele ana i kekahi o nā kūlana hana ʻoi loa i ka hana semiconductor. ʻIke ʻia nā kūlana o ka mahana kiʻekiʻe, ke kemika kinoea ikaika a me nā pōʻaiapuni hana lōʻihi e kēia mau ʻāpana. No laila, he mea koʻikoʻi ka graphite porosity haʻahaʻa loa e mālama i ka pono a me ka maʻemaʻe o ka SiC epitaxy. Pili ka porosity i nā pores liʻiliʻi, kūloko e kū nei i loko o ke kino graphite ponoʻī. ʻOiai he ʻili laumania maikaʻi loa, hiki i nā pores kūloko ke loaʻa nā kinoea hana paʻa, nā koena a me ka kemika hoʻomaʻemaʻe. ʻO ke kiʻekiʻe o ka porosity ʻo ia hoʻi ka nui o loko no ka paʻa ʻana, kahi ma hope o ka hōʻike ʻana i ka mahana kiʻekiʻe, hiki ke hoʻohemo mālie ʻia nā mea. ʻAʻole mau kēia degassing linear a hiki ke alakaʻi i nā pahū, e paʻakikī ai ke kaʻina hana. I ka SiC epitaxy, he mea hōʻino loa kēia. Ke hoʻokuʻu ʻia nā kinoea mai ke kino graphite hiki ke hoʻokomo ʻia i loko o ke kahe kinoea i loko o ke keʻena epitaxy, e hāʻawi ana i nā ʻāpana i makemake ʻole ʻia. E ʻike nā ʻāpana i ko lākou ala ma luna o ka ʻili wafer, e hoʻopilikia ana i ka ulu ʻana o ke kristal a hiki ke alakaʻi i nā hemahema i manaʻo ʻole ʻia e like me nā lua random, ka ʻili ʻana a i ʻole nā ​​​​​​ʻano kūloko o ka mānoanoa o ka wafer. ʻO kahi hiʻohiʻona maʻamau i loaʻa i nā alapiʻi hana kahi e loaʻa ai i kahi fab maʻemaʻe nā ʻāpana graphite hou no kahi ʻōnaehana EPIK. Hiki ke ʻae ʻia nā hopena mua, akā naʻe i ka hana hou ʻana o nā pōʻaiapuni thermal, hiki ke piʻi aʻe nā helu hemahema a ʻo ka nānā ʻana i ke kaʻina hana me nā laina kinoea, nā valves a me nā pae hana hoʻomaʻemaʻe e hōʻike ʻole i kahi mea maopopo. Hōʻike pinepine ʻia ʻo ka mea hana hewa ka graphite haʻahaʻa-porosity i loko o ka ʻāpana wela kiʻekiʻe. ʻO ke koho ʻana o ka graphite porosity ultra haʻahaʻa e hoʻemi pono i kēia pilikia ma ka palena ʻana i nā nui o loko e hiki ai ke hūnā ʻia nā ʻano i hoʻopaʻa ʻia, e hoʻemi ana i ka hiki ke hoʻokuʻu koke ʻia ke kinoea i ka wā e wela ai. Hoʻopili pū ʻia me ka pono mechanical maikaʻi. ʻO ka ʻano denser o ka graphite porosity ultra haʻahaʻa e hāʻawi pinepine i ka pale ʻana i ka haki ʻana i ka wā e hana hou ai ka graphite i ka pōʻaiapuni thermal. Eia kekahi, hoʻolaha nā ʻili porosity haʻahaʻa i ka pono o ka uhi ʻana. Ke uhi ʻia ʻo SiC a i ʻole nā ​​​​mea refractory ʻē aʻe ma luna o kēia mau ʻili graphite, pili maikaʻi lākou i kahi ʻili porous liʻiliʻi. ʻO kēia paha ma muli o ka hoʻonui ʻia ʻana o ka pilina ma waena o ka mea i uhi ʻia a me ka graphite, kahi e hoʻonui ai i ke kūpaʻa a me ka lōʻihi o nā uhi a me ko lākou hiki ke ʻili a ʻōpala paha. I ka hopena, ʻo ke koho ʻana o ka graphite porosity haʻahaʻa loa i kahi hiʻohiʻona hana i kēlā me kēia lā, ʻoiai he waiwai mea, hāʻawi i ka pono pololei loa i ka hoʻokō ʻana i nā hopena wafer paʻa, maʻemaʻe, hiki ke wānana ʻia i loko o nā kaʻina hana SiC epitaxy kiʻekiʻe.