SiC Cantilever hoe

Ⅰ. ʻO nā hoe ʻo SiC Cantilever Maʻemaʻe Kiʻekiʻe no ka lawelawe ʻana i ka Wafer pololei

ʻO SiC Cantilever Paddles nā mea koʻikoʻi i hoʻohana ʻia i nā lako hana wela no ka lawelawe ʻana i nā wafers i ka wā epitaxy, diffusion, a me nā ʻanuʻu oxidation i ka hana semiconductor. ʻO kā lākou mau mea wela a me nā mea mechanical e kūpono iā lākou no nā kaiapuni kiʻekiʻe a me nā corrosive i nā hana lumi maʻemaʻe.

Ⅱ. Nānā Huahana a me nā pono hana

1. Nā Pono Pono Kūikawā no nā noi hana kiʻekiʻe

Hana ʻia ʻo Semixlab's SiC Cantilever Paddles mai ka hoʻomaʻemaʻe kiʻekiʻe, recrystallized silicon carbide (R-SiC) a i ʻole CVD SiC coatings, e hāʻawi ana i ka conductivity thermal maikaʻi loa (a hiki i 120 W/m·K), haʻahaʻa wela haʻahaʻa (~ 4.0 x 10⁻⁶/K), a me ke kūpaʻa kūwaho i ka ʻino a me ka wela. Hoʻopaʻa kēia mau waiwai i ke kākoʻo wafer paʻa i ka wā o nā kaʻina hana wela, e hōʻemi ana i ka deformation wafer a i ʻole nā ​​pilikia.

2. ʻO ke kūlana kiʻekiʻe a me ka palahalaha

Me ka liʻiliʻi liʻiliʻi ma nā mahana ma mua o 1400 ° C, ʻo ka hoʻolālā cantilever e hōʻoia i ka hoʻokomo ʻana o ka wafer a me ka hoʻololi ʻana, he mea nui ia no ka like ʻana o ka papa epitaxial. ʻO ka haʻahaʻa haʻahaʻa a me ka ʻoʻoleʻa kiʻekiʻe o SiC e hoʻomaikaʻi i ka throughput ʻōnaehana a me ka pane ʻana o ka mahana i ka wā o ka hoʻoili wela.

3. Cleanroom-Grade Papa Maʻemaʻe

Mahalo i ka hoʻopau ʻana i ka ʻili o ka SiC paʻapū a me ka paheʻe, hoʻemi nā hoe Semixlab i ka hoʻokumu ʻana i nā ʻāpana a me ka hoʻokuʻu ʻana. He mea koʻikoʻi kēia i nā kaiapuni e koi ana i ka pae maʻemaʻe o ka papa 1 a i ʻole ISO 14644-1 Class 2.

4. Hana ʻia no nā kapuahi Epitaxial, Diffusion, a me CVD

Hoʻohana nui ʻia kā mākou SiC Cantilever Paddles i MOCVD, LPCVD, a me nā kahua kapuahi oxidation, kūpono me nā mea hana alakaʻi e like me ASM, TEL, a me Veeco. Hoʻolālā ʻia lākou no ka hoʻohālikelike wela maikaʻi loa a me ka pololei mechanical, e kōkua ana i ka hōʻoia ʻana i ka hopena kiʻekiʻe a me ka hoʻololi ʻana o ke kaʻina hana.

Ⅲ. No ke aha e koho ai iā Semixlab?

Hāʻawi mākou i nā lawelawe ʻenehana i hana ʻia, me:

● Hoʻoponopono huahana no ka nui, ka hoʻolālā, a me ka papa waiwai

● Hoʻopili i ka uhi ʻana no ka pale wela a me ke kemika

● Hiki ke hana prototyping wikiwiki a me ka nui liʻiliʻi

● Kūkākūkā loea a me ka hōʻoia hoʻolālā

Ma ke ʻano he alakaʻi alakaʻi Kina a me ka hale hana o nā huahana SiC Cantilever Paddles, koi ʻo Semixlab i ka hāʻawi ʻana i ka ʻenehana maʻamau a me nā hopena huahana. Inā makemake ʻoe e hoʻomaikaʻi i ke kaʻina hana lapaʻau e kū nei, kūʻai i nā ʻāpana pani hana kiʻekiʻe, a i ʻole e hoʻomohala pū i nā hoʻonā SiC maʻamau, e hāʻawi ʻo Semixlab iā ʻoe i ke kākoʻo ʻenehana a me ka lawe ʻana.

● MOCVD epitaxy wafer lawe

● Oxidation a me diffusion kapuahi hoe lima

● Pūnaehana hoʻouka Wafer i nā mea hana LPCVD/CVD

● Nā lima kākoʻo susceptor maʻamau no ka ulu ʻana o ka semiconductor hui