ʻO ka pahu kalapona Composite Crucible

I ka ulu ʻana o ke aniani silika (Czochralski kaʻina), hoʻohana mua ʻia ka C/C crucible ma ke ʻano he kākoʻo hoʻolālā a me ka mea hoʻomalu wela e hoʻopuni ana i ka pahu i loko fused-silica. ʻO kona hoʻonui haʻahaʻa haʻahaʻa, ka ikaika mechanical kiʻekiʻe, a me ke kūpaʻa haʻalulu wela maikaʻi e kōkua i ka mālama ʻana i ka geometry crucible i ka wā huki huki lōʻihi, e hōʻemi ana i ka deformation quartz a hiki i nā gradients mahana like ʻole. Hāʻawi pololei kēia i ka hoʻomaikaʻi ʻana i ka mana dislocation, ʻoi aku ka lōʻihi o ka hoʻohana ʻana i ka quartz crucible ola, a me ka hoʻonui ʻana i ka like ʻole o ka monocrystalline silicon ingot.

I loko o nā ʻōnaehana silicon a me SiC epitaxy, lawelawe ʻo Carbon Carbon Composite Crucible ma ke ʻano he mea lawe paʻa wela kiʻekiʻe a me ka mea hoʻokele wela, e kākoʻo ana i nā susceptors a me nā hale paʻa wafer. ʻO ka hiki i ka composite ke mālama i ka ʻoʻoleʻa a me ka inertness kemika i loko o ka hydrogen, chlorinated, a i ʻole kiʻekiʻe-vacuum kaiapuni he mea nui ia no ka hōʻemi ʻana i ka hoʻohaumia ʻana a me ka loaʻa ʻana o ka hana wela hiki ke wānana. ʻO ka hopena, ʻoi aku ka paʻa o ka mānoanoa o ka papa epitaxial, ʻoi aku ka maikaʻi o ka ʻili o ka mīkini, a me ka hoʻomaikaʻi ʻana i ka reactor uptime.

No ka ulu ʻana o SiC monocrystal me ka hoʻohana ʻana i ka Physical Vapor Transport (PVT), lilo ka C/C crucible i mea nui o ke keʻena sublimation. ʻO ka mana kiʻekiʻe kiʻekiʻe o ka carbon-carbon composites - ʻoi aku ma mua o 2200 ° C i loko o nā lewa inert - hiki i ka crucible ke kū i nā pōʻai sublimation lōʻihi me ka mālama ʻana i kahi kahua wela kūpaʻa koʻikoʻi no ka hōʻemi ʻana i nā hemahema i nā boules SiC. ʻO kāna mau haʻahaʻa haumia haʻahaʻa a me ka liʻiliʻi liʻiliʻi e hoʻemi i ka hopena o ka doping me ka hoʻolaha ʻole ʻana i ka micropipe, e kākoʻo ana i ka hana ʻana i nā kristal 4H a me 6H SiC kiʻekiʻe i hoʻohana ʻia i ka uila mana kiʻekiʻe.

Hoʻolālā ʻia no nā mea hana semiconductor e hiki mai ana, hiki i ka Semixlab C/C crucible ke kiʻekiʻe o ka huahana, ʻoi aku ka lōʻihi o ke ola ʻana o ka mea hana, a me ka maikaʻi o ka kristal kiʻekiʻe ma waena o nā kahua hana. Hana ʻia ʻo Semixlab's Carbon Carbon Composite Crucible me ke kaʻina hana koʻikoʻi, e komo pū ana me ke koho precursor maʻemaʻe kiʻekiʻe, multi-step densification, a me ka mālama ʻana i ka ʻili. ʻO ka hopena, he crucible me ka maikaʻi o ka nui o ke kūpaʻa, hoʻonui i ka pale ʻana i ka oxidation, a me ka hoʻohaʻahaʻa nui ʻana i ka hoʻokuʻu ʻana i nā ʻāpana i hoʻohālikelike ʻia me nā koho graphite maʻamau. Loaʻa kēlā me kēia huahana i ka nānā pololei a me ka hōʻoia thermal-mechanical e hōʻoia i ka hana maʻamau i nā mea huki CZ ʻoihana, nā reactors epitaxy vertical/horizontal, a me nā kapuahi SiC PVT.