Hoʻopilikino sic coated wafer susceptor

He mea koʻikoʻi ka SiC coated wafer susceptor i ka hana semiconductor, ʻoi loa i nā kaʻina ulu epitaxial e like me MOCVD, PECVD, a me CVD. Hoʻohana ia ma ke ʻano he kaʻa paʻa e kākoʻo ana i nā wafers ma lalo o ka wela kiʻekiʻe, corrosive, a me nā kaiapuni maloʻo, e hōʻoiaʻiʻo ana i ka hoʻololi ʻana i ka wela a me ka hana ʻole o ka contamination. Ma ka hoʻopili ʻana i kahi uhi CVD SiC ma luna o kahi susceptor graphite maʻemaʻe kiʻekiʻe, hoʻohui ka susceptor i ka hana wela maikaʻi loa me ke kūpaʻa kemika kiʻekiʻe-e lilo ia i mea nui no ka hana semiconductor hanauna hou.

Ka Hui Mea & Pono Kino

Hana ʻia ka Customized SiC Wafer Susceptor mai Semixlab me ka hoʻohana ʻana i ʻelua mau mea kumu:

Ka uhi ʻana o CVD SiC

● ʻO ka paʻakikī (Mohs 9+) a me ka lōʻihi

●Maʻemaʻe kiʻekiʻe (>99.999%) e hōʻemi i ka hoʻokumu ʻana o nā ʻāpana

● ʻO ke kino kemika maikaʻi loa e kūʻē i nā kinoea ʻino (HCl, NH₃, H₂, etc.)

●Paʻa wela a hiki i **1600°C

●Dense, ʻaʻahu uhi mānoanoa no ka lōʻihi lawelawe ola

Kiekie-Maemae Graphite Susceptor

●Kiʻekiʻe thermal conductivity no ka paʻa wela mahele

● ʻO ke ʻano māmā i hoʻohālikelike ʻia me nā ceramics monolithic

●Precision-mīkini e hoʻokō koʻikoʻi wafer flatness koi

●Stable mechanical ikaika ma lalo o thermal paikikala

ʻO kēia mau mea i hui pū ʻia e hana i ka susceptor i uhi ʻia ʻo SiC me ke kūpaʻa nui ʻana i ka haʻalulu wela, ka erosion plasma, a me ka hoʻohaumia ʻana i nā ʻāpana, e hōʻoia ana i ka maikaʻi o ka wafer.

Nā noi ma ka hana Semiconductor

Hoʻohana nui ʻia ka SiC coated wafer susceptor i nā kaʻina semiconductor holomua, ʻoi aku hoʻi i:

●Epitaxial Wafer Growth (Epi Wafer Manufacturing): E hōʻoia i ka hoʻomehana like ʻana a hōʻemi i ke kūlou ʻana o ka wafer i ka wā epitaxial deposition o SiC, GaN, GaAs, a me nā semiconductors hui ʻē aʻe.

●MOCVD & CVD Kaʻina hana : Hāʻawi i kahi ʻili paʻa kemika, maʻemaʻe kiʻekiʻe no ka waiho ʻana i nā kiʻiʻoniʻoni lahilahi.

●LED & Power Semiconductor hana : Kākoʻo i nā wafers LED ʻālohilohi a me nā lako bandgap ākea i nā keʻena ulu ulu wela.

●Ka Hoʻohui ʻana a me ka Hoʻolaha ʻana i ka Mahana Kiʻekiʻe : E mālama i ka paʻa o ke kūkulu ʻana ma lalo o nā pōʻai wela i ka wā e pale ana i ka haumia.

Ma ka hoʻonui ʻana i ka hoʻoili wela a me ka mālama pono ʻana i ka ʻili, hoʻopili pololei ka susceptor i ka hua wafer, ka like ʻole, a me ka hoʻohaʻahaʻa hemahema-e lilo ia i mea koʻikoʻi i nā laina kaʻina epitaxial.

Nā Pono Hoʻokūkū Semixlab

Ma Semixlab, hāʻawi mākou i nā mea ʻoi aku ma mua o nā mea maʻamau - hāʻawi mākou i nā hopena i hoʻokō ʻia i nā koi koi o nā mea hana semiconductor:

ʻIke Hoʻopilikino

Hoʻolālā a hana i nā susceptors ma nā ʻano nui, nā ʻano, ka mānoanoa o ka uhi ʻana, a me nā geometries e hoʻohālikelike i nā reactors MOCVD/CVD kikoʻī.

Paʻa Wafer i uhi ʻia ʻo SiC

ʻO Silicon Carbide i uhi ʻia i ka Wafer Susceptor

Kūkākūkā ʻenehana

Hāʻawi ka hui ʻenehana loea i nā ʻōlelo aʻoaʻo kikoʻī e hoʻomaikaʻi i ka hua wafer a hoʻonui i ke ola susceptor.

Ho'āʻo Kūlana Kiʻekiʻe

Loaʻa nā huahana a pau i ka hoʻāʻo koʻikoʻi no ke kūpaʻa wela, ka pale kemika, a me ka lōʻihi mechanical ma lalo o nā kūlana kaʻina hana maoli.